Article ID Journal Published Year Pages File Type
1670279 Thin Solid Films 2010 5 Pages PDF
Abstract

A process for the deposition of a solid layer onto a liquid is presented. The polymer poly-di-chloro-para-xylylene, also known as Parylene C, was grown on low vapour pressure liquids using the conventional low pressure chemical vapour deposition process. A reactor was built and a process developed to enable the deposition of Parylene C at atmospheric pressure over high vapour pressure liquids. It was used to deposit Parylene C over water among others. In all cases Parylene C encapsulated the liquid without influencing its initial shape. The results presented here show also that the Parylene C properties are not affected by its growth on liquid templates and the roughness of the Parylene C surface in contact with the liquid during the deposition is extremely low.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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