Article ID Journal Published Year Pages File Type
1670649 Thin Solid Films 2010 4 Pages PDF
Abstract

Epitaxial ZnO thin films have been grown on (0001) sapphire substrates by pulsed laser deposition. The structural and electrical transport properties of the films are measured as a function of the growth temperature and substrate cleaning procedure. The XRD measurements reveal that the cleaning procedure affects drastically the twin formation. Its origin could be attributed to a residual hydrocarbon layer or defects (oh- or O vacancies) at the sapphire surface. The electrical transport characteristics of the films are found to depend moderately on the existence of twinning.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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