Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1670668 | Thin Solid Films | 2010 | 4 Pages |
Abstract
This work reports on the low temperature preparation and characterization of BaZrO3 (BZO) epitaxial thin films by chemical solution deposition (CSD). The X-ray θ–2θ scan and φ-scan measurements have demonstrated that the BZO films exhibit cube-on-cube epitaxy on (100) MgO substrates, with the full width at half maximum (FWHM) for the ω-scan and φ-scan of 0.35° and 0.46°, respectively. The SEM and AFM analyses revealed that the morphology of the films is strongly correlated with annealing temperature. The root mean square roughness for the film annealed at 600 °C is 3.63 nm, while for the film grown at 1000 °C is 5.25 nm.
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Authors
R.B. Mos, M.S. Gabor, M. Nasui, T. Petrisor Jr., C. Badea, A Rufoloni, L. Ciontea, T. Petrisor,