Article ID Journal Published Year Pages File Type
1670668 Thin Solid Films 2010 4 Pages PDF
Abstract

This work reports on the low temperature preparation and characterization of BaZrO3 (BZO) epitaxial thin films by chemical solution deposition (CSD). The X-ray θ–2θ scan and φ-scan measurements have demonstrated that the BZO films exhibit cube-on-cube epitaxy on (100) MgO substrates, with the full width at half maximum (FWHM) for the ω-scan and φ-scan of 0.35° and 0.46°, respectively. The SEM and AFM analyses revealed that the morphology of the films is strongly correlated with annealing temperature. The root mean square roughness for the film annealed at 600 °C is 3.63 nm, while for the film grown at 1000 °C is 5.25 nm.

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Physical Sciences and Engineering Materials Science Nanotechnology
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