Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1670752 | Thin Solid Films | 2009 | 6 Pages |
Abstract
Transparent zinc oxide thin films were grown by reactive pulsed laser deposition on glass substrates. The substrates were kept at 200 °C constant temperature. Post-deposition heat treatment, applied to further promote crystallization and overcome any oxygen deficiency, yielded transparent thin films. Structural investigations carried out by atomic force microscopy (AFM) and X-ray diffraction (XRD), have shown a strong influence of deposition technique parameters and post-annealing on the crystallinity of the zinc oxide films. The gas sensing characteristics of these films were investigated towards different hydrogen concentrations (5000–30,000 ppm) at a selected operating temperature within the 150–230 °C range.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
M. Stamataki, I. Fasaki, G. Tsonos, D. Tsamakis, M. Kompitsas,