| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1670898 | Thin Solid Films | 2010 | 4 Pages |
Abstract
Two-dimensional periodically polarity-inverted (PPI) ZnO structures were fabricated on (0001) Al2O3 substrates using plasma assisted molecular beam epitaxy. Holographic lithography was carried out for the realization of nanometer-scale patterns of CrN which was obtained by nitridation of Cr metal. The PPI ZnO structures consisted of Zn-polar regions grown on CrN and O-polar regions grown on Zn-terminated AlN/Al2O3. The periodical polarity inversion was confirmed by voltage-piezo response curves and contrast in the piezo response microscopy images. A diffraction pattern of the fabricated PPI ZnO sample was observed when a He-Ne laser beam was incident on the sample surface.
Keywords
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
J.S. Park, T. Minegishi, S. Ahn, S.H. Park, S.K. Hong, H. Jeon, I.H. Im, J.H. Chang, T. Yao,