| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1671051 | Thin Solid Films | 2010 | 4 Pages |
Abstract
Novel sublayer surface treatments were investigated to improve the conductivity of aluminum-doped zinc oxide (ZnO:Al) fabricated by using dc magnetron sputtering on a glass substrate. Introducing artificial minute flaws on the surface of glass substrates enhanced the crystallinity of ZnO:Al films and decreased the resistivity accompanying the increase of electron mobility. Combination of the surface treatment and sputter beam control, i.e., interruption of high-energy oxygen with shadow masks, further reduced the resistivity of the film to 3.7 × 10− 4 Ω cm (thickness 70 nm).
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yasuo Imanishi, Mitsuo Taguchi, Ken-ichi Onisawa,