Article ID Journal Published Year Pages File Type
1671517 Thin Solid Films 2009 5 Pages PDF
Abstract

Epitaxial γ-Al2O3 thin films were grown on diverse substrates using pulsed laser deposition. The high quality of epitaxial growth and cubic structure of γ-Al2O3 films was confirmed by X-ray diffraction. SrTiO3 and MgO single crystal substrates were used to optimize the growth conditions for epitaxial γ-Al2O3 film. Under the optimized conditions, epitaxial γ-Al2O3 thin films were grown on flexible, single-crystal-like, metallic templates. These included untextured Hastelloy substrates with a biaxially textured MgO layer deposited using ion-beam-assisted-deposition and biaxially textured Ni-W metallic tapes with epitaxially grown and a biaxially textured, MgO buffer layer. These biaxially textured, γ-Al2O3 films on flexible, single-crystal-like substrates are promising for subsequent epitaxial growth of various complex oxide films used for electrical, magnetic and electronic device applications.

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Physical Sciences and Engineering Materials Science Nanotechnology
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