| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1671594 | Thin Solid Films | 2007 | 4 Pages |
Abstract
We report a new method of evaluating the adhesion of Al2O3-doped (2 wt.%) ZnO (AZO) thin films. The AZO films were deposited by DC reactive magnetron sputtering on plastic film (PET: polyethyleneterephthalate) at various sputtering pressures, power, and reactive gas-flow ratios. The adhesion test of the films was carried out using the nanoindentation system. The fracture point as determined by the load–displacement curve occurred at the time of separation between the thin film and the substrate. The integration value of load and displacement to the fracture point is defined as the degree of adhesion (SW). The AZO films showed that adhesion increase as sputtering power increases and sputtering pressure decreases.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Shina Kuriki, Toshitaka Kawashima,