Effect of substrate temperature on structural, electrical and optical properties of Ga-doped ZnO films on cycro olefin polymer substrate by ion plating deposition

The dependences of the structural, electrical and optical properties of transparent conductive Ga-doped ZnO (GZO) films with a thickness of 100 nm on the unheated cyclo olefin polymer (COP) and alkali-free glass substrate temperatures has been studied. GZO films were prepared on substrates by ion plating deposition with direct-current arc discharge. The substrate temperature rises with longer plasma exposure time. By controlling the time of exposure to plasma such that the substrate temperature does not exceed 100 °C, highly transparent conductive GZO with the resistivity of less than 7 × 10− 4 Ω cm on COP and glass substrates can be obtained.