Article ID Journal Published Year Pages File Type
1672089 Thin Solid Films 2008 4 Pages PDF
Abstract

A high throughput screening method was developed for automatic measurements of ferroelectric thin film samples with piezoresponse force microscopy. Libraries of samples with varying chemical compositions, produced with high throughput experimentation via the sol–gel route, were examined and piezoresponse images were recorded. A procedure was designed to calculate figures of merit that are related to the piezoelectric coefficient d33. They were used to identify the most promising samples within a combinatorial library. The method was evaluated through comparison with macroscopic permittivity measurements.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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