Deposition of WNxCy thin films for diffusion barrier application using the dimethylhydrazido (2−) tungsten complex (CH3CN)Cl4W(NNMe2)

Tungsten nitride carbide (WNxCy) thin films were deposited by chemical vapor deposition using the dimethylhydrazido (2−) tungsten complex (CH3CN)Cl4W(NNMe2) (1) in benzonitrile with H2 as a co-reactant in the temperature range 300 to 700 °C. Films were characterized using X-ray diffraction (XRD), Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy and four-point probe to determine film crystallinity, composition, atomic bonding, and electrical resistivity, respectively. The lowest temperature at which growth was observed from 1 was 300 °C. For deposition between 300 and 650 °C, AES measurements indicated the presence of W, C, N, and O in the deposited film. The films deposited below 550 °C were amorphous, while those deposited at and above 550 °C were nano-crystalline (average grain size < 70 Å). The films exhibited their lowest resistivity of 840 µΩ-cm for deposition at 300 °C. WNxCy films were tested for diffusion barrier quality by sputter coating the film with Cu, annealing the Cu/WNxCy/Si stack in vacuum, and performing AES depth profile and XRD measurement to detect evidence of copper diffusion. Films deposited at 350 and 400 °C (50 and 60 nm thickness, respectively) were able to prevent bulk Cu transport after vacuum annealing at 500 °C for 30 min.