Article ID Journal Published Year Pages File Type
1672658 Thin Solid Films 2007 7 Pages PDF
Abstract

Synthesis of alumina nanoparticles in an Ar–O2 inductively coupled radio frequency (rf) plasma controlled by axial quench gas injection was investigated. The flow and temperature fields for various quench gas flow rates in the plasma reactor, as well as the corresponding quench rates, were predicted using a renormalization group (RNG) k–ε turbulence model. Nanosize alumina particles were synthesized from the vapor phase by oxidation of aluminum in the plasma. The collected products were characterized by means of field emission scanning electron microscopy (FE-SEM), dynamic light scattering (DLS), and BET surface area analysis. The dependences of particle size and shape on the injection position and the flow rate of the quench gas were discussed.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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