Article ID Journal Published Year Pages File Type
1672723 Thin Solid Films 2008 4 Pages PDF
Abstract

Thin films of Al2O3 grown using atomic layer deposition (ALD) techniques can protect polymers from erosion by oxygen atoms. To quantify this protection, polyimide substrates with the same chemical repeat unit as Kapton® were applied to quartz crystal microbalance (QCM) sensors. Al2O3 ALD films with varying thicknesses were grown on the polyimide substrates. The ALD-coated polyimide materials were then exposed to a hyperthermal atomic-oxygen beam. The mass loss versus oxygen-atom exposure time was measured in situ by the QCM. Al2O3 ALD film thicknesses of ∼ 35 Å were found to protect the polymer from erosion.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
, , , , , ,