Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1672996 | Thin Solid Films | 2007 | 4 Pages |
Abstract
The optical and electrical properties of indium tin oxide (ITO) thin films deposited using a pulsed laser deposition at room temperature can be substantially enhanced by adopting a two-step process. X-ray diffraction patterns and atomic force microscopy images were used to observe the structural properties of the films. High quality ITO films grown by two-step process could be obtained with the resistivity of 3.02 Ã 10â 4 Ω cm, the carrier mobility of 32.07 cm2/Vs, and the transparency above 90% in visible region mainly due to the enhancement of the film crystallinity and the increase of grain size.
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Materials Science
Nanotechnology
Authors
Jong Hoon Kim, Byung Du Ahn, Choong Hee Lee, Kyung Ah Jeon, Hong Seong Kang, Gun Hee Kim, Sang Yeol Lee,