Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1673384 | Thin Solid Films | 2008 | 5 Pages |
Abstract
In this work the spectroscopic ellipsometry and the reflectometry/transmission measurements together with an advanced plasma monitor were used for inline measurements. All systems were installed in an inline sputtering equipment which enables a continuous deposition process—the condition for a direct feedback to the deposition parameters. The metrology tools were connected by a framework software which used an XML over TCP/IP connection. The setup allowed to control the multilayer deposition using a deposition script and to use the metrology tools for measuring the thicknesses and to correct the deposition rates.
Related Topics
Physical Sciences and Engineering
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Nanotechnology
Authors
U. Richter, W. Hentsch, H. Liepack, R. Kruse, R. Dittrich,