Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1673439 | Thin Solid Films | 2008 | 4 Pages |
Abstract
α-Alumina-g-polyacrylamide (α-Al2O3-g-PAM) composite abrasive was prepared by surface graft polymerization. The composition, structure and morphology of the product were characterized by Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectroscopy, and scanning electron microscopy, respectively. Then, the chemical mechanical polishing performances of the composite abrasive on glass substrates were investigated. Atomic force microscopy images show that the average roughness of the polished glass substrate surface can be decreased from 0.74 nm for pure α-Al2O3 abrasive to 0.45 nm for α-Al2O3-g-PAM abrasive.
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Physical Sciences and Engineering
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Authors
Hong Lei, Haishen Lu, Jianbin Luo, Xinchun Lu,