| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1673675 | Thin Solid Films | 2006 | 6 Pages |
Abstract
Homogeneity profiles of the constituent films of a single silver layer product were determined using transmission and reflection measurements across the width of the substrate. Measurements were made with a traveling measurement system common to many industrial magnetron lines. The technique, based on Fresnel relations, and using pre-determined dispersion functions for the film materials, provided good correlation between homogeneity profiles using real time online measurements and profiles determined from spectrophotometric laboratory measurements.
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Physical Sciences and Engineering
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Authors
C. Anderson,