| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1673783 | Thin Solid Films | 2008 | 4 Pages |
Abstract
This paper reports the feasibility for industrial implementation of Cat-CVD (Hot-Wire CVD) technology. Some application examples are shown, and their features and problems are described. Cat-CVD is a unique technology which has a lot of possibilities. Some of them will be commercialized in the near future, but the others need a breakthrough for mass production.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Shin Asari, Tetsushi Fujinaga, Makiko Takagi, Masanori Hashimoto, Kazuya Saito, Masamichi Harada, Michio Ishikawa,