| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1673820 | Thin Solid Films | 2008 | 4 Pages |
Abstract
Dependence of catalyzing materials on deposition of polytetrafluoroethylene (PTFE = ”Teflon” in commercial) films by catalytic chemical vapor deposition (Cat-CVD) method is investigated. It has been clarified that Ni-containing catalyzers has a catalyzing effect that can decompose hexafluoropropylene-oxide (HFPO) to form PTFE films. A novel method named Dual Cat-CVD is also proposed. In the method, carbonized and fluorinated surface of Ni-containing catalyzer is removed and refreshed using atomic hydrogen generated by additionally introduced tungsten (W) catalyzer in the same chamber. This Dual Cat-CVD method enables to recover the deposition rate of PTFE films drastically.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Hiroaki Yasuoka, Masahiro Yoshida, Ken Sugita, Keisuke Ohdaira, Hideyuki Murata, Hideki Matsumura,