Article ID Journal Published Year Pages File Type
1673900 Thin Solid Films 2008 4 Pages PDF
Abstract

We employ textured α-Cr2O3 thin films as templates for growth of α-Al2O3 by reactive inductively coupled plasma magnetron sputtering. The texture of the template has a strong influence on the nucleation and growth of α-Al2O3. Extended growth of α-Al2O3 at a substrate temperature of 450 °C is obtained using a predominantly [101̄4]-textured α-Cr2O3 template layer, while only limited α-Al2O3 nucleation is seen on a [0001]-textured α-Cr2O3 template.

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Physical Sciences and Engineering Materials Science Nanotechnology
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