Article ID Journal Published Year Pages File Type
1674333 Thin Solid Films 2008 8 Pages PDF
Abstract

Since Bi2O3–ZnO–Nb2O5 (BZN) pyrochlore thin films have been introduced as a tunable dielectric, the substitution of Bi with Pb could be a reasonable choice. The PbO–ZnO–Nb2O5 (PZN) cubic pyrochlore thin films were produced by radio frequency sputtering, and their dielectric properties, in terms of tunability, were measured. Up to 33.4% of tunability and comparable K factors with BZN films were obtained. The effects of film crystallization, along with substrate heating and post-annealing on the dielectric properties, were similar to those of BZN. However, strong texturing developed in the PbO–ZnO–Nb2O5 (PZN) films deposited at a high substrate temperature, which caused degradation of the loss tangent and K factor.

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Physical Sciences and Engineering Materials Science Nanotechnology
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