Peculiarities of nitrogen dioxide detection with sprayed undoped and indium-doped zinc oxide thin films

Nitrogen dioxide (NO2) sensors based on sprayed zinc oxide (ZnO) thin films have been prepared. The effect of the film thickness and the In-doping on the sensor performance (sensor response and resistance) is analyzed. By adding 3 wt.% of indium nitrate to the spraying solution it is possible to enhance the film-gas response to 5 ppm of NO2 at 275 °C. At the same time the film resistance is sensibly reduced. The film crystallographic structure, morphology and additive content are studied by means of X-ray Diffraction, Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy and Atomic Force Microscopy. The possible sensitization mechanism is discussed.