Raman and luminescence probes for the study of compound semiconductors

Optical characterization using local probes with submicrometric spatial resolution is very useful for many problems concerning compound semiconductors and devices. In particular, micro-Raman spectroscopy and cathodoluminescence spectrum imaging are very powerful analytical techniques that manage good signal/noise ratios allowing to acquire images including spectral information and slightly submicrometric spatial resolution in a short time. The main analytical and spatial resolution aspects concerning both techniques are addressed. Several examples are presented in order to illustrate the capabilities of micro-Raman and cathodoluminescence spectrum imaging for the characterization of compound semiconductors and the devices based on them.