Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1674562 | Thin Solid Films | 2007 | 4 Pages |
In photovoltaic devices, rather thin intrinsic layers of good quality materials are required and high deposition rates are a key point for a cost-effective mass production. In a previous study we have shown that good quality amorphous silicon (a-Si:H) films can be deposited by matrix distributed electron cyclotron resonance (MDECR) plasma CVD at very high deposition rates (∼ 2.5 nm/s). However, only thick films (> 1 μm) exhibited good transport properties. A very poor thermal coupling between the substrate holder and the substrate is the main reason for such a behaviour. We present here experimental data which support this conclusion as well as the improved transport and defect-related properties of new very thin a-Si:H samples (thickness around 0.3 μm) deposited at a higher temperature than the previous ones.