Article ID Journal Published Year Pages File Type
1674678 Thin Solid Films 2006 5 Pages PDF
Abstract

Barium strontium titanate (Ba0.7Sr0.3TiO3, abbreviated as BST) thin films were grown on MgO (001) single crystal substrates using pulsed laser deposition. A heteroepitaxial growth relationship of <001> BST // <001> MgO was confirmed by X-ray diffraction. The bidimensional structure of a rib waveguide was designed using the effective index method. A BST/MgO rib waveguide was fabricated using photolithography and reactive ion etching techniques. A single-mode near-field output pattern was observed using an end-fire coupling method at a wavelength of 1550 nm, which is consistent with our numerical calculation.

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Physical Sciences and Engineering Materials Science Nanotechnology
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