Article ID Journal Published Year Pages File Type
1674929 Thin Solid Films 2008 4 Pages PDF
Abstract
(Bi3.2La0.4Nd0.4)Ti3O12 (BLNT) thin films were prepared on Pt/Ti/SiO2/Si substrates by using chemical solution deposition technique, and the effects of annealing temperatures in the range of 550-750 °C on structure and electrical properties of the thin films were investigated. X-ray diffraction analysis shows that the thin films have a bismuth-layered perovskite structure with preferred (117) orientation. The surface morphology observation by field-emission scanning electron microscopy confirms that films are dense and smooth with uniformly distributed grains. The grain size of the thin films increases with increasing annealing temperature; meanwhile, the structural distortion of the thin films also increases. It was demonstrated that the thin films show good electrical properties. The dielectric constant and dielectric loss are 191 and 0.028, respectively, at 10 kHz for the thin film annealed at 600 °C, and the 2Pr value of the thin film annealed at 700 °C is 20.5 μC/cm2 at an electric field of 500 kV/cm.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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