| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1674946 | Thin Solid Films | 2008 | 4 Pages |
Abstract
Chromium nitride coatings were deposited using a hybrid physical vapor deposition (PVD) system containing a filter arc deposition (FAD) and a metal plasma ion implantation source (MPII). Exactly how surface residual stress affects film characteristics is investigated using glancing incident X-ray diffraction (GIXRD) and pole figure analyses. Compared with unimplanted CrN, implanted carbon typically increases compressive residual stress and hardness. Wear resistance was also improved by implanted carbon.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Ko-Wei Weng, Ya-Chi Chen, Sheng Han, Chih-Sheng Hsu, Yung-Lin Chen, Da-Yung Wang,