Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1674953 | Thin Solid Films | 2008 | 4 Pages |
Abstract
A new method to prepare compositional amorphous carbon (a-C) film termed gradient pulse bias is presented. The a-C film prepared this way showed outstanding mechanical and excellent tribological properties. The hardness and reduced modulus of the film are calculated to be 66 GPa and 320 GPa respectively. A wear rate of 1.3 × 10− 8 mm3/N m and frictional coefficient of 0.1 was also recorded. The novel film is also compared with multilayered and single layer a-C film prepared using the same system.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Edwin H.T. Teo, Daniel H.C. Chua, M.L. Lee, C.L. Ee, C.K. Lee, B.K. Tay,