Article ID Journal Published Year Pages File Type
1675100 Thin Solid Films 2006 8 Pages PDF
Abstract
Homoepitaxial strontium titanate (SrTiO3) thin films have been grown by pulsed laser deposition in order to identify those defects which are intrinsic to the growth of SrTiO3. The pulse rate and oxygen annealing pressure were varied, although the oxygen pressure had no effect under these conditions. Columnar growth was common. The nature of the columns is described, but the reason for their presence is not fully understood. They can be suppressed using a high laser pulse rate.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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