Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1675215 | Thin Solid Films | 2007 | 4 Pages |
Abstract
Cerium oxide thin films are deposited on glass by pulsed laser deposition at room temperature and characterized by X-ray diffraction and atomic force microscopy. The effects of ambient gas, rate of deposition and fluence on growth of films have been studied. The films grown in forming gas and with a high rate of deposition are polycrystalline and show preferential orientation along <011> direction with a roughness of ∼ 2 nm. Films prepared in oxygen have low crystallinity.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Tapas Chaudhuri, Sovannary Phok, Raghu Bhattacharya,