Article ID Journal Published Year Pages File Type
1675250 Thin Solid Films 2008 4 Pages PDF
Abstract

We have deposited and characterised ZnO on flexible and transparent plastic polymer. We employed a specially designed vapour phase growth system with elemental sources for zinc and oxygen and deposited thin ZnO films at temperatures below 400 °C. Basic photoluminescence characterisation confirms ZnO. Ohmic contacts were fabricated on these layers and the layers exhibit significantly high electron concentration with carrier mobility μ of up to 10.78 cm2 V−1 s−1. Furthermore, we show how these layers can be processed with conventional device processing techniques.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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