Article ID Journal Published Year Pages File Type
1675433 Thin Solid Films 2006 6 Pages PDF
Abstract

The effects of doping with copper and titanium on the optical properties of a silver alloy layer for storage media usage were investigated in this study. Doped silver alloy thin films were deposited using specially prepared targets and direct current (DC) sputtering. The results show that copper content ranging from 0.5 wt.% (AC0.5) to 1.5 wt.% (AC1.5) enhances the uniformity of thin film and reduces its grain size. For environmental stability, titanium was introduced, although this dopant will decrease the reflectivity of the silver-based alloy thin films. The silver alloy thin films with 1 wt.% titanium (ACT1) have good corrosion-resistant behavior. Films with 3 wt.% titanium (ACT3) are difficult to manufacture since the uniformity of the mechanical properties is poor and the grain size is coarser.

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Physical Sciences and Engineering Materials Science Nanotechnology
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