Rapid thermal two-stage metal-organic chemical vapor deposition growth of epitaxial BaTiO3 thin films

Rapid thermal MOCVD technique was adopted and applied for growing epitaxial films of BaTiO3 on MgO substrates. A detailed description of modified experimental set-up design is given. Major modifications are towards optimizing the sources and gas lines. A new barium metal-organic precursor was developed on the basis of mixed ligand complexes of barium β-diketonates. Testing procedures showed that the developed precursor offers the advantages of low melting temperature, good volatility and ease of synthesis and handling.Grown layers were characterized by low and high resolution X-ray diffraction, scanning electron microscopy (SEM), and energy dispersive spectrometry in SEM in order to obtain information on structural quality, surface morphology and composition.