Article ID Journal Published Year Pages File Type
1675560 Thin Solid Films 2007 4 Pages PDF
Abstract

Tuning of structural and electrical properties of indium oxide (In2O3) films by means of metal organic chemical vapor deposition is demonstrated. Phase selective growth of rhombohedral In2O3(0001) and body-centered cubic In2O3(001) polytypes on (0001) sapphire substrates was obtained by adjusting the substrate temperature and trimethylindium flow rate. The specific resistance of the as-grown films can be tuned by about two orders of magnitude by varying the growth conditions.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
, , , , , ,