Photoelectron spectroscopy and secondary ion mass spectrometry characterization of diamond-like carbon films

Photoelectron spectroscopy at different photon energies was used to optimize the photoexcitation cross section for valence band study of diamond-like hydrogenated carbon films. The electronic states of diamond-like carbon (DLC) were studied by synchrotron radiation photoelectron spectroscopy and ultraviolet photoelectron spectroscopy. The valence band spectra measured at different excitation energies show the gradual emergence of the p–π band in relation to the sample annealing and ion bombardment amorphization. The p–π band of the annealed DLC was characterized by localized pz states whilst the formation of the amorphous carbon surface was accompanied by appearance of the delocalized pz states in the gap. Secondary ion mass spectrometry and thermal desorption spectroscopy showed that sample annealing was accompanied by hydrogen content decrease.