Article ID Journal Published Year Pages File Type
1676122 Thin Solid Films 2007 5 Pages PDF
Abstract

An epoxy-functional inorganic–organic hybrid material system for use in photonic waveguiding applications was synthesised by the sol–gel method. The influence of preparation process parameters such as composition and UV irradiation, on the properties of the deposited thin films was studied. Crack-free films with thickness up to 37 μm were obtained from a single-step deposition process. A tunable refractive index, at 633 nm, which ranged between 1.480 and 1.515 was observed by modifying the concentration of the refractive index modifier. It was also demonstrated that UV irradiation resulted in an increase in the refractive index of the system by 0.49%. Planar waveguiding structures were demonstrated. A high thermal stability, up to 275 °C, was achieved compatible with post-processing integration processes.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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