Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1676294 | Thin Solid Films | 2007 | 5 Pages |
Abstract
Plasma parameters in the vicinity of the dielectric window of a low density, microwave discharge produced in O2 at 915 MHz are investigated by a spherical probe and optical emission spectroscopy while the microwave field distribution is measured by a spectrum analyzer. The electron energy distribution function is found to be strongly dependent on the position with respect to the slot antenna, exhibiting a group of energetic electrons at locations where the electric field and the optical intensity exhibit maximum values. The density of energetic electrons decreases sharply just a few cm away from the dielectric.
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Authors
S. Nakao, E. Stamate, H. Sugai,