Article ID Journal Published Year Pages File Type
1676375 Thin Solid Films 2006 9 Pages PDF
Abstract

The initial oxidation of magnesium at oxygen partial pressures between 1.3 × 10− 8 Pa and 1.3 × 10− 5 Pa and at temperatures just above room temperature has been investigated in situ with X-ray photoelectron spectroscopy (XPS) and ellipsometry. Quantitative analysis of the XPS spectra showed that the initially formed oxide has a higher Mg/O ratio (> 1.3) than bulk MgO. Ellipsometry measurements indicated that the band gap values of the oxide layers are considerably smaller than the value expected for bulk MgO (∼ 2.5 eV vs. 7.8 eV). From the XPS and ellipsometry data recorded as a function of oxidation time the oxidation kinetics have been determined. The kinetics has been described quantitatively with a coupled currents model, involving simultaneous transport of electrons and ions through the oxide layer.

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