Article ID Journal Published Year Pages File Type
1676812 Thin Solid Films 2006 5 Pages PDF
Abstract

The influence of annealing in various atmospheres on properties of the undoped SnOx thin films has been studied. The films with thickness of ∼400 nm have been deposited on glass substrate by a method of magnetron sputtering in argon–oxygen atmosphere at the pressure inside the chamber 0.9 and 2.7 Pa. The dependences of structural and optical properties of SnOx films from temperature of annealing in air, vacuum and atmosphere hydrogen have been investigated. Correlations between the structural and optical properties of tin oxide films were found.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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