Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1676902 | Thin Solid Films | 2006 | 6 Pages |
Abstract
As an economically more attractive alternative to the classical thick graded strain-relaxed SiGe Buffer layers (SRB), we have developed a thin SRB based on a 200-nm-thick homogeneous Si0.8Ge0.2 layer with a C-doping spike inserted in about the middle of the layer. This C-doping layer enhances strongly the relaxation of the layer to â¼Â 80%, when compared to samples without C layer. The thin SRB shows threading defect densities â¤Â 107/cm2 and a very smooth surface (RMS < 1 nm). The relaxation mechanism appears to be very similar to the “Modified Frank Read” (MFR) mechanism as developed by Legoues et al. [F. Legoues, B. Meyerson, J. Morar and P. Kirchner; J. Appl. Phys. 71 (1992) 4230.]. In our case, the MFR source for dislocation nucleation may consist of tiny SiC precipitates.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Matty Caymax, Romain Delhougne, Mike Ries, Martina Luysberg, Roger Loo,