Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1676965 | Thin Solid Films | 2006 | 5 Pages |
Abstract
Titanium–carbide films were grown using a magnetron assisted pulse laser deposition combining KrF pulsed laser deposition and DC magnetron sputtering (PLDMS). Plasma streams produced by magnetron and laser ablation were intersected on the substrate surface. Films' properties were characterized by GDOES, AFM, XRD, XPS as well as by Raman spectroscopy. The adhesion and microhardness were also studied. Crystalline TiC films were fabricated at room temperature.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
M. Jelínek, T. Kocourek, J. Kadlec, V. Vorlíček, M. Čerňanský, V. Studnička, A. Santoni, P. Boháč, F. Uherek,