Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1677114 | Thin Solid Films | 2006 | 5 Pages |
Abstract
The nucleation stage toward CoSi2 with average island size of about 4 nm and uniform island size distribution is obtained from a TiN/Co/Ti/Co/SiOx/Si multilayer with the SiOx as a mediated layer by annealing at 460 °C for 240 s followed by 600 °C 240 s. It is found that Ti capping layer can enhance Co diffusion into the Si substrate at higher temperature (600 °C 240 s) annealing, which results in larger nucleus size (average grain size about 12 nm) but nonuniform nucleus size distribution. However, two-step annealing for 460 °C 240 s followed by 600 °C 240 s results in a smaller average nucleus size with better nucleus size distribution. The mechanism responsible for the discrepancy is discussed in the paper.
Keywords
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Juin-Jie Chang, Tsung-Eong Hsieh, Chuan-Pu Liu, Ying-Lang Wang,