Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1677189 | Thin Solid Films | 2006 | 5 Pages |
Abstract
Hydrogen-free nanostructured carbon (nc-C) films were synthesized at various graphite target power densities using a closed field unbalanced magnetron sputtering system (CFUBM). The power density of each graphite target was varied from 10 to 30 W/cm2 in Ar gas atmosphere with a fixed pressure of 0.4 Pa and a substrate bias voltage ofâ200 V. The aim of this study was to determine the relationship between the microstructure and physical properties of nc-C films as a function of the target power density. The film structures were examined by Raman spectroscopy, X-ray photoelectron spectroscopy and field emission scanning electron microscopy. The physical properties of the nc-C films were evaluated using a nano-indentation tester, a 4-point probe and a residual stress tester. The number of graphitic nano-cluster increased with increasing target power density and a good conductive nanostructured carbon film was obtained. The nc-C film deposited at a target power density of 30 W/cm2 exhibited the minimum electrical resistivity.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Hyun S. Myung, Yong S. Park, B. Hong, Jeon G. Han, Young H. Kim, Jeong Y. Lee, Leonid R. Shaginyan,