Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1677529 | Ultramicroscopy | 2013 | 6 Pages |
Abstract
⺠The sinusoidal scan and the intelligent controller are used to improve AFM's rate. ⺠A new method is raised to overcome the nonlinearity caused by the sinusoidal scan. ⺠A new controller is proposed to improve the performance of the vertical direction.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yanyan Wang, Xiaodong Hu, Linyan Xu, Xiaotang Hu,