Article ID Journal Published Year Pages File Type
1677529 Ultramicroscopy 2013 6 Pages PDF
Abstract
► The sinusoidal scan and the intelligent controller are used to improve AFM's rate. ► A new method is raised to overcome the nonlinearity caused by the sinusoidal scan. ► A new controller is proposed to improve the performance of the vertical direction.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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