| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1677558 | Ultramicroscopy | 2012 | 6 Pages |
Abstract
⺠We presents a simple method for obtaining the depth information in SEM-based nanomanipulation. ⺠Detecting contact between an end-effector and a target surface using SEM as a vision sensor. ⺠Additional touch/force sensors or specialized hardware need not be added. ⺠Achieved high repeatability and accuracy. ⺠Complete automatic contact detection within typically 60 s.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Changhai Ru, Steve To,