Article ID Journal Published Year Pages File Type
1677611 Ultramicroscopy 2013 5 Pages PDF
Abstract
► SiOx/SiO2 multilayers containing Si-ncs have been characterized using atom probe. ► Influence of SiOx composition on decomposition mode has been investigated. ► Influence of sublayer thicknesses on phase separation has been studied.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Phase transformation in SiOx/SiO2 multilayers for optoelectronics and microelectronics applications
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