Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1677791 | Ultramicroscopy | 2011 | 11 Pages |
Abstract
⺠High-throughput TEM operation is increasingly needed for research and industry. ⺠Autonomous high-throughput TEMs enabled by systems and control theory. ⺠Measure-by-wire is a new holistic automation oriented engineering view of TEM. ⺠A detailed example shows how to apply MBW to the automatic control of defocus.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Arturo Tejada, Arnold J. den Dekker, Wouter Van den Broek,