Article ID Journal Published Year Pages File Type
1677791 Ultramicroscopy 2011 11 Pages PDF
Abstract
► High-throughput TEM operation is increasingly needed for research and industry. ► Autonomous high-throughput TEMs enabled by systems and control theory. ► Measure-by-wire is a new holistic automation oriented engineering view of TEM. ► A detailed example shows how to apply MBW to the automatic control of defocus.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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