| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1677894 | Ultramicroscopy | 2011 | 5 Pages |
Abstract
⺠Two types of microcolumn designs to achieve a large field of view are fabricated. ⺠Field of view of a microcolumn increases linearly with the working distance. ⺠New designed microcolumns can be developed as a low energy column system for large view inspections.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Young Chul Kim, Seung-Joon Ahn, Tae-Sik Oh, Dae-Wook Kim, Ho-Seob Kim, Won Kweon Jang,