| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1677917 | Ultramicroscopy | 2010 | 7 Pages |
Abstract
We demonstrate that energy selective scanning electron microscopy can lead to substantial dopant contrast and resolution improvements (compared to standard SEM) when the energy selection is carried out based on Monte Carlo modelled secondary electron spectra in combination with detector transfer modelling.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
C. Rodenburg, M.A.E. Jepson, E.G.T. Bosch, M. Dapor,