Laser assisted atom probe analysis of thin film on insulating substrate

We demonstrate that the atom probe analyses of metallic thin films on insulating substrates are possible using laser assisted field evaporation. The tips with metallic thin film and insulating substrate (0.6–3 μm in thickness) were prepared by the lift-out and annular ion beam milling techniques on tungsten supports. In spite of the existence of thick insulating layer between the metallic film and the tungsten support, atom probe tomography with practical mass resolution, signal-to-noise ratio and spatial resolution was found to be possible using laser assisted field evaporation.

Research Highlights► We investigated that atom probe analyses of metallic thin films on insulating substrates are possible using femtosecond laser. ► We successfully obtained the atom maps, which are consistent with the TEM observation result. ► We made the insulating substrate thinner results in loss of measurement performance. ► UV laser will have advantages in the yield of successful analysis compared to green laser.